JPS6218036Y2 - - Google Patents

Info

Publication number
JPS6218036Y2
JPS6218036Y2 JP1978155955U JP15595578U JPS6218036Y2 JP S6218036 Y2 JPS6218036 Y2 JP S6218036Y2 JP 1978155955 U JP1978155955 U JP 1978155955U JP 15595578 U JP15595578 U JP 15595578U JP S6218036 Y2 JPS6218036 Y2 JP S6218036Y2
Authority
JP
Japan
Prior art keywords
probe
tip
probe needles
opening
mounting piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1978155955U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5574046U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978155955U priority Critical patent/JPS6218036Y2/ja
Publication of JPS5574046U publication Critical patent/JPS5574046U/ja
Application granted granted Critical
Publication of JPS6218036Y2 publication Critical patent/JPS6218036Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1978155955U 1978-11-13 1978-11-13 Expired JPS6218036Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978155955U JPS6218036Y2 (en]) 1978-11-13 1978-11-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978155955U JPS6218036Y2 (en]) 1978-11-13 1978-11-13

Publications (2)

Publication Number Publication Date
JPS5574046U JPS5574046U (en]) 1980-05-21
JPS6218036Y2 true JPS6218036Y2 (en]) 1987-05-09

Family

ID=29145473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978155955U Expired JPS6218036Y2 (en]) 1978-11-13 1978-11-13

Country Status (1)

Country Link
JP (1) JPS6218036Y2 (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59762Y2 (ja) * 1979-02-07 1984-01-10 日本電子材料株式会社 プロ−ブカ−ド
JPH0766934B2 (ja) * 1987-03-31 1995-07-19 東京エレクトロン株式会社 プロ−ブカ−ドおよびその製造方法
JPH0630367B2 (ja) * 1987-05-01 1994-04-20 東京エレクトロン株式会社 プロ−ブカ−ド

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5153478A (ja) * 1974-11-06 1976-05-11 Hitachi Ltd Koteipuroobukaado

Also Published As

Publication number Publication date
JPS5574046U (en]) 1980-05-21

Similar Documents

Publication Publication Date Title
CN111751583B (zh) 探针头及探针卡
JP6872943B2 (ja) 電気的接続装置
JPS6218036Y2 (en])
TW457651B (en) Socket for inspecting semiconductor element, semiconductor device, and manufacture of the semiconductor device
JPS5833700B2 (ja) 固定プロ−ブ・ボ−ド
JP2811295B2 (ja) 垂直型プローブカード
JPH06230033A (ja) プローブ基板
JPS5811741B2 (ja) プロ−ブボ−ド
KR100743587B1 (ko) 반도체 칩 탑재용 기판의 검사용 프로브 유니트
JPH06174748A (ja) 狭小ピッチ対応型プローブカード
JP2013250224A (ja) プローブカード及びその製造方法
TWM553422U (zh) 用於晶圓量測之垂直式探針卡與探針頭
JP4585111B2 (ja) プローブカード
JPH02221881A (ja) 集積回路装置試験用プローブ
KR101525238B1 (ko) 프로브 구조체
JPS6043664B2 (ja) 半導体装置
JPS6362343A (ja) プロ−ブ・カ−ド
JP2015152393A (ja) プローブカード
JPH06230032A (ja) プローブ基板
JP2559129B2 (ja) プローブカード
JPS6130281Y2 (en])
JPH0636581Y2 (ja) プロ−ブボ−ド
JPH06140481A (ja) プローブカード
JPS5826531Y2 (ja) プロ−ブカ−ド
JPH09138242A (ja) プローブカード